JPH0282771U - - Google Patents

Info

Publication number
JPH0282771U
JPH0282771U JP16148588U JP16148588U JPH0282771U JP H0282771 U JPH0282771 U JP H0282771U JP 16148588 U JP16148588 U JP 16148588U JP 16148588 U JP16148588 U JP 16148588U JP H0282771 U JPH0282771 U JP H0282771U
Authority
JP
Japan
Prior art keywords
sheet
passage
chambers
pressure difference
belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16148588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16148588U priority Critical patent/JPH0282771U/ja
Publication of JPH0282771U publication Critical patent/JPH0282771U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16148588U 1988-12-12 1988-12-12 Pending JPH0282771U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16148588U JPH0282771U (en]) 1988-12-12 1988-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16148588U JPH0282771U (en]) 1988-12-12 1988-12-12

Publications (1)

Publication Number Publication Date
JPH0282771U true JPH0282771U (en]) 1990-06-26

Family

ID=31444465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16148588U Pending JPH0282771U (en]) 1988-12-12 1988-12-12

Country Status (1)

Country Link
JP (1) JPH0282771U (en])

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